Near infrared (NIR) emitter bulb
On the fab floor, photoresist bake is anything but passive. A 2°C drift during soft bake spreads CD variation across the lot. Hard bake...
Near infrared (NIR) wafer dryer
Out on the fab floor, you learn to sweat the small stuff. A sub-0.1°C drift during soft bake can tilt critical dimension bias and scrap a whole lot...