সিরামিক ইনফ্রারেড হিটার প্যানেল

Mon, 08 Jun 2026 04:59:22 +0800

On the lithography floor, a 0.5°C drift during soft bake isn’t a “small error.” It’s a scrapped lot. It’s thermal budget down the drain and critical dimension control that’s gone sideways. We built our ceramic infrared heater panels to stop that drift where it starts.

What matters, technically

The panel uses ceramic infrared emitters to hit the wafer with fast, direct radiant heat, and it keeps thermal uniformity within sub-millimeter tolerances across the whole surface. You get a thermal field that repeats, and it holds tighter than a conventional hot plate. In practice, that means ±0.1°C stability across the bake surface, so photoresist flow stays consistent and line widths behave predictably. Cleanroom Class 1–100 compatibility is baked into the design: low outgassing materials, sealed joints, and a surface that doesn’t shed particles. The system runs 24/7 without unplanned downtime, and the heaters keep output stable for thousands of hours.

সেরামিক on Compact IR Heating Units

সিরামিক ইনফ্রারেড হিটার প্যানেল

What matters, technically