http://ir-heat-unit.com/zh/tags/%E7%87%83%E6%96%99/ Recent content in 燃料 on Compact IR Heating Units Hugo zh Tue, 02 Jun 2026 08:48:35 +0800 http://ir-heat-unit.com/zh/posts/fuel-cell-catalyst-drying-lamp/ Tue, 02 Jun 2026 08:48:35 +0800 http://ir-heat-unit.com/zh/posts/fuel-cell-catalyst-drying-lamp/ <p><img src="http://ir-heat-unit.com/images/a071a4619f1d04d8f3e2839bd3740f1c.png" alt="燃料电池催化剂干燥灯"></p> <p>在光刻线上，软烘烤温度即使偏移半度，也足以导致CD曲线偏移，进而烧掉一小时的晶圆启动时间。我们设计了燃料电池催化剂干燥灯，以消除热预算中的这种波动。它在近红外（NIR）波段快速加热，干热与光刻胶的吸收峰<a href="https://goldisgood.com">匹配</a>，实现可重复的溶剂去除且无超调。</p>