Keeping your Class 100 Cleanroom actually clean When you’re working in a Class 100 environment, even a tiny speck of dust is a disaster. The...

Out on the litho floor, a temperature drift or a slow warm-up can wreck what should be a stable batch. Wafer drying, soft bake, and hard bake all...

On the fab floor, photoresist bake is anything but passive. A 2°C drift during soft bake spreads CD variation across the lot. Hard bake...

On the lithography floor, a soft bake that drifts even half a degree can throw off critical dimension bias and wipe out a whole lot. You need heat...